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The dead end of chips: Manufacturing semiconductors consumes as much energy as entire countries
(english.elpais.com)
This is a most excellent place for technology news and articles.
I'd be interested in a "payback period" for modern chips, as in, how long the power savings in a modern chip takes to pay for its manufacturing costs. Basically, calculate performance/watt with some benchmark, and compare that to manufacturing cost (perhaps excluding R&D to simplify things).
Honestly, if you go through all the node changes you could do the math and figure out. Like N3 to N2 is a 15-20% performance gain at the same power useage.
It wouldn't be exact. But I doubt any company will tell you how much power would be used in the creation of a single wafer